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Model Reduction for Pull-in Voltage Analysis of SOI MEMS based Capacitive Accelerometer

Neha Tiwari, Sunil R. Gupta Published in Artificial Intelligence

IJAIS Proceedings on 2nd National Conference on Innovative Paradigms in Engineering and Technology (NCIPET 2013)
Year of Publication: 2013
© 2012 by IJAIS Journal
10.5120/ncipet1340
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  1. Neha Tiwari and Sunil R Gupta. Article: Model Reduction for Pull-in Voltage Analysis of SOI MEMS based Capacitive Accelerometer. IJAIS Proceedings on 2nd National Conference on Innovative Paradigms in Engineering and Technology (NCIPET 2013) NCIPET(2):1-3, November 2013. BibTeX

    @article{key:article,
    	author = "Neha Tiwari and Sunil R. Gupta",
    	title = "Article: Model Reduction for Pull-in Voltage Analysis of SOI MEMS based Capacitive Accelerometer",
    	journal = "IJAIS Proceedings on 2nd National Conference on Innovative Paradigms in Engineering and Technology (NCIPET 2013)",
    	year = 2013,
    	volume = "NCIPET",
    	number = 2,
    	pages = "1-3",
    	month = "November",
    	note = "Published by Foundation of Computer Science, New York, USA"
    }
    

Abstract

In general, MEMS accelerometers fabrication relies more on trial and error than on clear design principles. Since the trial and error basis fabrication and testing of a MEMS are extremely costly, comprehensive modeling and simulation can be valuable tool to evaluate different designs and perform parametric studies each MEMS design before actual fabrication. This paper presents work done for SOI Mumps based capacitive accelerometer for health monitoring system and its reduction for the finite element simulation purpose in Coventorware. Reduction of structure for pull in voltage analysis by reducing the structure has been done. System level simulation is efficient in time but finite element method is needed for accuracy. Here the reduction of model needed as the structure is of thousand microns and its parts are of few microns, simulation of which is costly in computation time and resource needed.

Reference

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Keywords

Accelerometer, Capacitive, Coventorware Comb type, FEM, MEMS, SOI , Pull in Voltage